Advances in multilayer x-ray/EUV optics:  synthesis, performance, and instrumentation

Troy W. Barbee Jr.

doi:10.1117/12.55655

1 July 1990 Advances in multilayer x-ray/EUV optics: synthesis, performance, and instrumentation

Troy W. Barbee Jr.

Optical Engineering, Vol. 29, Issue 7, (July 1990). https://doi.org/10.1117/12.55655

The field of multilayer optics for the x-ray, soft x-ray and extreme ultraviolet wavelengths is maturing at a rapid pace. There are more than forty groups worldwide actively working in this area. A large part of these efforts is directed to improving the quality of multilayer structures by developing a better understanding of the synthesis-structure-property relationship. Although the quality of multilayer structures may be substantially improved, there are now significant instrumental applications for these reflecting optics. In this paper the current status of this field is discussed.

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Troy W. Barbee Jr. "Advances in multilayer x-ray/EUV optics: synthesis, performance, and instrumentation," Optical Engineering 29(7), (1 July 1990). https://doi.org/10.1117/12.55655

Published: 1 July 1990

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