Phase shifting in an oblique incidence interferometer

Doris Boebel; Bernd Packross; Hans J. Tiziani

doi:10.1117/12.56025

1 December 1991 Phase shifting in an oblique incidence interferometer

Doris Boebel, Bernd Packross, Hans J. Tiziani

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Optical Engineering, Vol. 30, Issue 12, (December 1991). https://doi.org/10.1117/12.56025

Abstract

The evaluation of the interference pattern of a prism interferometer by a phase-stepping technique is described. The required phase shift is achieved by moving the surface under test perpendicular to the hypotenuse of the prism. Limits of this phase-shifting technique are discussed. A calibration method of the phase shift between the interferograms for the adjustable sensitivity of the interferometer is shown. Finally measurements of technical surfaces are presented.

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Doris Boebel, Bernd Packross, and Hans J. Tiziani "Phase shifting in an oblique incidence interferometer," Optical Engineering 30(12), (1 December 1991). https://doi.org/10.1117/12.56025

Published: 1 December 1991

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