Articles

Microcreep deformation measurements by a moire method using electron beam lithography and electron beam scan

[+] Author Affiliations
Satoshi Kishimoto, Mitsuru Egashira, Norio Shinya

National Research Institute for Metals (Japan)

Opt. Eng. 32(3), 522-526 (Mar 01, 1993). doi:10.1117/12.61046
History: Online November 22, 2005
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Abstract

Abstract not available

© 2005 COPYRIGHT SPIE--The International Society for Optical Engineering.

Citation

Satoshi Kishimoto ; Mitsuru Egashira and Norio Shinya
"Microcreep deformation measurements by a moire method using electron beam lithography and electron beam scan", Opt. Eng. 32(3), 522-526 (Mar 01, 1993). ; http://dx.doi.org/10.1117/12.61046


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