1 April 1994 Effect of fabrication errors on multilevel Fresnel zone lenses
Margit Ferstl, Berndt Kuhlow, Edgar Pawlowski
Author Affiliations +
Abstract
Blazed Fresnel zone lenses for the 1.5-μm wavelength were fabricated in quartz glass by means of microstructuring technology. The blazed profile in each zone of the lenses was approximated by two, four, and eight discrete levels. The effects of fabrication errors, such as depth and alignment errors, on the diffraction efficiency of the different Fresnel zone lenses were investigated. Further the location and intensity of the parasitic foci appearing due to the discrete level approximation are calculated. Theoretical results along with experimental measurements are presented.
Margit Ferstl, Berndt Kuhlow, and Edgar Pawlowski "Effect of fabrication errors on multilevel Fresnel zone lenses," Optical Engineering 33(4), (1 April 1994). https://doi.org/10.1117/12.163122
Published: 1 April 1994
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Cited by 23 scholarly publications.
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KEYWORDS
Lenses

Etching

Diffraction

Photomasks

Optical alignment

Chromium

Phase shifts

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