Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors

In-Bok Kong; Seung-Woo Kim

doi:10.1117/12.201667

1 May 1995 Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors

In-Bok Kong, Seung-Woo Kim

Author Affiliations +

Optical Engineering, Vol. 34, Issue 5, (May 1995). https://doi.org/10.1117/12.201667

Abstract

One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as to enhance achievable measurement accuracy. We propose a new phase-measuring algorithm that can identify the actual amounts of phase shifts directly from interlerograms without prior calibration. This is named the A-bucket algorithm and has the advantage of being inherently free from any phase-shift error that is constant across an interferogram. The main emphasis of this paper is given to a practicable application of the A-bucket algorithm to prove that accurate measurement is allowed in portable mode even in the presence of vibration.

Citation Download Citation

In-Bok Kong and Seung-Woo Kim "Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors," Optical Engineering 34(5), (1 May 1995). https://doi.org/10.1117/12.201667

Published: 1 May 1995

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