Articles

Holographic microlithography

[+] Author Affiliations
Francis S. M. Clube, Simon Gray, Denis Struchen, Jean-Claude Tisserand, Stephane Malfoy, Yves Darbellay

Holtronic Technologies (Switzerland)

Opt. Eng. 34(9), 2724-2730 (Sep 01, 1995). doi:10.1117/12.205673
History: Online November 23, 2005
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Abstract

Abstract not available

© 2005 COPYRIGHT SPIE--The International Society for Optical Engineering.

Citation

Francis S. M. Clube ; Simon Gray ; Denis Struchen ; Jean-Claude Tisserand ; Stephane Malfoy, et al.
"Holographic microlithography", Opt. Eng. 34(9), 2724-2730 (Sep 01, 1995). ; http://dx.doi.org/10.1117/12.205673


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