Refractive indices of the tungsten oxide films prepared by sol-gel and sputtering processes

Toshikazu Nishide; Fujio Mizukami

doi:10.1117/12.212914

1 November 1995 Refractive indices of the tungsten oxide films prepared by sol-gel and sputtering processes

Toshikazu Nishide, Fujio Mizukami

Author Affiliations +

Optical Engineering, Vol. 34, Issue 11, (November 1995). https://doi.org/10.1117/12.212914

Abstract

Tungsten oxide films were prepared by sol-gel and sputtering processes. The refractive indices and extinction coefficients of the films were calculated from the transmittance and reflectance spectra in the visible and infrared regions. The films were transparent in the visible and infrared regions when they were prepared by the 501-gel process and fired at 300°C and 500°C, and by the sputtering process under the conditions of O₂/Ar=0.05 and 0.1 at room temperature. The refractive indices of the films depended on preparation conditions. The extinction coefficients of the films were almost zero in the visible and infrared regions. On the other hand, film prepared by the sputtering process under the condition of O₂/Ar=0.01 was blue colored. The refractive index of the film increased with increasing wavelength in the visible and infrared region. The extinction coefficient ofthe film showed a large value at 1450 nm, which corresponds to the minimum of the transmittance spectrum of the film.

Citation Download Citation

Toshikazu Nishide and Fujio Mizukami "Refractive indices of the tungsten oxide films prepared by sol-gel and sputtering processes," Optical Engineering 34(11), (1 November 1995). https://doi.org/10.1117/12.212914

Published: 1 November 1995

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available