Articles

Large‐aperture high‐accuracy phase‐shifting digital flat interferometer

[+] Author Affiliations
Lei Chen

Nanjing University of Science and Technology Photoelectronic Technology Department Xiao Lingwei 200 Nanjing 210094 China

Daojiong Chen

Anhui Institute of Technology P. O. Box 84 Hefei, Anhui 230031 China

Opt. Eng. 35(7), 1936-1942 (Jul 01, 1996). doi:10.1117/1.600627
History: Received Sep. 14, 1995; Accepted Nov. 22, 1995
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Abstract

A large‐aperture high‐accuracy phase‐shifting digital flat interferometer that is a combination of optics, mechanics, electricity, and algorithm is described. The aperture size is 250 mm and a liquid surface is used as an absolute flat to eliminate system error. The accuracy is better than λ/50 (λ=0.6328 μm, peak‐to‐valley value). The tested aperture can be enlarged to 500 mm. This interferometer has been used as an optical flat standard instrument for China. The optical interferometer, phase shifter, and calibration of precision are described. © 1996 Society of Photo−Optical Instrumentation Engineers.


Citation

Jinbang Chen ; Dezhen Song ; Rihong Zhu ; Qing Wang ; Lei Chen, et al.
"Large‐aperture high‐accuracy phase‐shifting digital flat interferometer", Opt. Eng. 35(7), 1936-1942 (Jul 01, 1996). ; http://dx.doi.org/10.1117/1.600627


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