Articles

Experimental study of waveguide grating couplers with parallelogramic tooth profiles

[+] Author Affiliations
Ming Li

Chalmers University of Technology Department of Optoelectronics and Electrical Measurements S-412 96 Go¨teborg, Sweden

Stephen J. Sheard

University of Oxford Department of Engineering Science Parks Road Oxford OX1 3PJ, United Kingdom

Opt. Eng. 35(11), 3101-3106 (Nov 01, 1996). doi:10.1117/1.601047
History: Received Mar. 7, 1996; Revised May 20, 1996; Accepted May 20, 1996
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Abstract

The fabrication process of waveguide grating couplers with parallelogramic tooth profiles is described, using a novel reactive‐ion etching (RIE) geometry to generate oblique anisotropic etching. The blazing effect of nonresonant parallelogramic grating couplers is demonstrated experimentally, with nearly 90% radiation directionality measured. The radiation factors of the grating couplers are also measured, and comparisons with simulated results show that the measured value is lower than that predicted theoretically. This is attributed to the deviation of the grating tooth profile from the ideal parallelogramic shape. © 1996 Society of Photo−Optical Instrumentation Engineers.

Topics

Teeth ; Waveguides

Citation

Ming Li and Stephen J. Sheard
"Experimental study of waveguide grating couplers with parallelogramic tooth profiles", Opt. Eng. 35(11), 3101-3106 (Nov 01, 1996). ; http://dx.doi.org/10.1117/1.601047


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