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Technique for monolithic fabrication of silicon microlenses with selectable rim angles

[+] Author Affiliations
Lars Erdmann, Dirk Efferenn

Robert Bosch GmbH, Zentralbereich Forschung und Vorausentwicklung, Abteilung FV/FLD, Postfach 10 60 50, D-70049 Stuttgart, Germany

Opt. Eng. 36(4), 1094-1098 (Apr 01, 1997). doi:10.1117/1.601300
History: Received Mar. 18, 1996; Revised Aug. 25, 1996; Revised Nov. 15, 1996; Accepted Nov. 16, 1996
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Abstract

Spherical microlenses are fabricated in a modified melting technology. Resist cylinders are patterned by photolithography and subsequently dissolved in a controlled solvent atmosphere. This technique enables the fabrication of spherical resist microlenses of selectable rim angles in the range from 1 to 30 deg. Photoresist microlenses with a focal length of 20 mm, a diameter of 1 mm and a good sphericity are realized. The photoresist lenses are transferred into the silicon substrate through reactive ion etching. Within the inner 80% of the lens diameter, the deviation of the silicon lenses from a sphere amounts to less than λ/20 at λ=1.55 μm. The resist and silicon lenses are characterized by mechanical and interferometric methods. This technology is compared with the well established melting technique. © 1997 Society of Photo-Optical Instrumentation Engineers.

© 1997 Society of Photo-Optical Instrumentation Engineers

Citation

Lars Erdmann and Dirk Efferenn
"Technique for monolithic fabrication of silicon microlenses with selectable rim angles", Opt. Eng. 36(4), 1094-1098 (Apr 01, 1997). ; http://dx.doi.org/10.1117/1.601300


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