Technique for monolithic fabrication of silicon microlenses with selectable rim angles

Lars Erdmann; Dirk Efferenn

doi:10.1117/1.601300

1 April 1997 Technique for monolithic fabrication of silicon microlenses with selectable rim angles

Lars Erdmann, Dirk Efferenn

Optical Engineering, Vol. 36, Issue 4, (April 1997). https://doi.org/10.1117/1.601300

Spherical microlenses are fabricated in a modified melting technology. Resist cylinders are patterned by photolithography and subsequently dissolved in a controlled solvent atmosphere. This technique enables the fabrication of spherical resist microlenses of selectable rim angles in the range from 1 to 30 deg. Photoresist microlenses with a focal length of 20 mm, a diameter of 1 mm and a good sphericity are realized. The photoresist lenses are transferred into the silicon substrate through reactive ion etching. Within the inner 80% of the lens diameter, the deviation of the silicon lenses from a sphere amounts to less than ?/20 at ?51.55?m. The resist and silicon lenses are characterized by mechanical and interferometric methods. This technology is compared with the well established melting technique.

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Lars Erdmann and Dirk Efferenn "Technique for monolithic fabrication of silicon microlenses with selectable rim angles," Optical Engineering 36(4), (1 April 1997). https://doi.org/10.1117/1.601300

Published: 1 April 1997

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