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Continuous-membrane surface-micromachined silicon deformable mirror

[+] Author Affiliations
Thomas G. Bifano, Raji Krishnamoorthy Mali, John Kyle Dorton, Julie Perreault, Nelsimar Vandelli, Mark N. Horenstein, David A. Castan˜on

Boston University, College of Engineering, Boston, Massachusetts 02215

Opt. Eng. 36(5), 1354-1360 (May 01, 1997). doi:10.1117/1.601598
History: Received Oct. 6, 1996; Revised Jan. 10, 1997; Accepted Jan. 17, 1997
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Abstract

The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces. © 1997 Society of Photo-Optical Instrumentation Engineers.

© 1997 Society of Photo-Optical Instrumentation Engineers

Citation

Thomas G. Bifano ; Raji Krishnamoorthy Mali ; John Kyle Dorton ; Julie Perreault ; Nelsimar Vandelli, et al.
"Continuous-membrane surface-micromachined silicon deformable mirror", Opt. Eng. 36(5), 1354-1360 (May 01, 1997). ; http://dx.doi.org/10.1117/1.601598


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