Single crystal silicon supported thin film micromirrors for optical applications

Zhimin Yao; Noel C. MacDonald

doi:10.1117/1.601349

1 May 1997 Single crystal silicon supported thin film micromirrors for optical applications

Zhimin Yao, Noel C. MacDonald

Optical Engineering, Vol. 36, Issue 5, (May 1997). https://doi.org/10.1117/1.601349

A novel process for fabrication of single crystal silicon supported torsional micromirrors with large dimensions (300 X 240 µm) is presented. The mirrors consist of a sputtered aluminum film on a layer of supporting oxide mounted on fully suspended single crystal silicon grids. The grids have an aspect ratio of 7:1 to provide a stiff backbone and to ensure flatness of the mirror surface. Thus the mirrors do not bend due to the internal stresses. A new idea of actuation of torsional structures is also presented. Vertical near-comb type actuators were fabricated to drive the torsional structures.

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Zhimin Yao and Noel C. MacDonald "Single crystal silicon supported thin film micromirrors for optical applications," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601349

Published: 1 May 1997

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