Articles

Angle measurement using total-internal-reflection heterodyne interferometry

[+] Author Affiliations
Ming-Horng Chiu, Der-Chin Su

National Chiao Tung University, Institute of Electro-Optical Engineering, 1001, Ta-Hsueh Road Hsin-Chu, Taiwan

Opt. Eng. 36(6), 1750-1753 (Jun 01, 1997). doi:10.1117/1.601200
History: Received Oct. 4, 1996; Revised Jan. 31, 1997; Accepted Jan. 31, 1997
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Abstract

A new optical method for angle measurement based on total-internal-reflection heterodyne interferometry is presented. In this method, heterodyne interferometry is applied to measure the phase difference between s and p polarization states at total internal reflection. This phase difference depends on the angle of incidence. Hence, small-angle measurement can be performed only by evaluating this phase difference. The validity of the method is demonstrated, and it has a measurement range of 10 deg. Its resolution depends on the angle of incidence; the best resolution is 8×10−5 deg. © 1997 Society of Photo-Optical Instrumentation Engineers.

© 1997 Society of Photo-Optical Instrumentation Engineers

Citation

Ming-Horng Chiu and Der-Chin Su
"Angle measurement using total-internal-reflection heterodyne interferometry", Opt. Eng. 36(6), 1750-1753 (Jun 01, 1997). ; http://dx.doi.org/10.1117/1.601200


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