Articles

High-resolution surface reconstruction using optically measured Gabor expansion coefficients

[+] Author Affiliations
Michael Friedmann, Tuvia Kotzer, Joseph Shamir

Technion–Israel Institute of Technology, Department of Electrical Engineering, Technion City, Haifa 32000, Israel

Opt. Eng. 36(7), 2068-2073 (Jul 01, 1997). doi:10.1117/1.601390
History: Received June 15, 1996; Revised Jan. 31, 1997; Accepted Jan. 31, 1997
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Abstract

We describe a new optical inspection method based on the analysis of the combined space-frequency representation of the scattered field. Samples of the sliding window spectrum are measured optically and then the surface features are reconstructed by numerical methods. The methods investigated include reconstruction from the Gabor expansion coefficients, using the Zak transform, and phase recovery from amplitude only data, using projection onto constraint sets algorithm. Computer simulations and experimental results show that this method can reconstruct accurately shallow phase objects, even when their dimensions are smaller than the diffraction limit of the optical setup. © 1997 Society of Photo-Optical Instrumentation Engineers.

© 1997 Society of Photo-Optical Instrumentation Engineers

Citation

Michael Friedmann ; Tuvia Kotzer and Joseph Shamir
"High-resolution surface reconstruction using optically measured Gabor expansion coefficients", Opt. Eng. 36(7), 2068-2073 (Jul 01, 1997). ; http://dx.doi.org/10.1117/1.601390


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