Articles

Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry

[+] Author Affiliations
Seung-Woo Kim, Min-Gu Kang, Geon-Soo Han

Korea Advanced Institute of Science and Technology, Department of Mechanical Engineering, Laboratory for Precision Engineering and Metrology, Yusong-gu, Taejon, 305-701, Korea

Opt. Eng. 36(11), 3101-3106 (Nov 01, 1997). doi:10.1117/1.601546
History: Received Mar. 5, 1997; Revised June 23, 1997; Accepted June 23, 1997
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Abstract

One important issue in phase-shifting interferometry is to eliminate or compensate for phase shift errors. One solution is to adopt a least-squares technique in that actual reference values of phase shifts are readily identified directly from interferograms. This however, requires a relatively long computation time since a considerable amount of intensity information must be processed in an iterative way. To cope with this problem, we present an accelerated version of a least-squares phase-measuring algorithm that can drastically reduce computation time. © 1997 Society of Photo-Optical Instrumentation Engineers.

© 1997 Society of Photo-Optical Instrumentation Engineers

Citation

Seung-Woo Kim ; Min-Gu Kang and Geon-Soo Han
"Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry", Opt. Eng. 36(11), 3101-3106 (Nov 01, 1997). ; http://dx.doi.org/10.1117/1.601546


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