Articles

Investigation of common-path interference profilometry

[+] Author Affiliations
Weidong Zhou, Zhaofei Zhou, Guichun Chi

Sichuan Union University, Department of Measurement and Control, Research Laboratory of Applied Laser, Chengdu 610065, China

Opt. Eng. 36(11), 3172-3175 (Nov 01, 1997). doi:10.1117/1.601555
History: Received Feb. 14, 1997; Revised May 28, 1997; Accepted June 19, 1997
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Abstract

The principle of laser common-path interference profilometry based on the theory of Gaussian beams is analyzed and its measurement equation is deduced. From the measurement equation, the main factors that affect the vertical resolution of the profilometer are discussed. According to the conclusions of the analysis, laser common-path interference profilometry can be used to measure microprofiles of fine surfaces with subnanometer vertical resolution. © 1997 Society of Photo-Optical Instrumentation Engineers.

© 1997 Society of Photo-Optical Instrumentation Engineers

Citation

Weidong Zhou ; Zhaofei Zhou and Guichun Chi
"Investigation of common-path interference profilometry", Opt. Eng. 36(11), 3172-3175 (Nov 01, 1997). ; http://dx.doi.org/10.1117/1.601555


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