Articles

Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography

[+] Author Affiliations
Gordon C. Brown, Ryszard J. Pryputniewicz

Worcester Polytechnic Institute, Center for Holographic Studies and Laser µmechaTronics, Mechanical Engineering Department, Worcester, Massachusetts?01609-2280

Opt. Eng. 37(5), 1398-1405 (May 01, 1998). doi:10.1117/1.601654
History: Received Nov. 10, 1997; Accepted Dec. 5, 1997
Text Size: A A A

Abstract

An optical microscope, utilizing the principles of time-averaged hologram interferometry, is described for microelectromechanical systems (MEMS) applications. MEMS are devices fabricated via techniques such as microphotolithography to create miniature actuators and sensors. Many of these sensors are currently deployed in automotive applications which rely on, or depend on, the dynamic behavior of the sensor, e.g., airbag sensors, ride monitoring suspensions sensors, etc. Typical dimensions of current MEMS devices are measured in micrometers, a small fraction of the diameter of a human hair, and the current trend is to further decrease the size of MEMS devices to submicrometer dimensions. However, the smaller MEMS become, the more challenging it is to measure with accuracy the dynamic characteristics of these devices. An electro-optic holographic microscope (EOHM) for the purpose of studying the dynamic behavior of MEMS type devices is described. Additionally, by performing phase measurements within an EOHM image, object displacements are determined as illustrated by representative examples. With the EOHM, devices with surface sizes ranging from approximately 35×400 to 5×18 μm are studied while undergoing resonant vibrations at frequencies as high as 2 MHz. © 1998 Society of Photo-Optical Instrumentation Engineers.

© 1998 Society of Photo-Optical Instrumentation Engineers

Citation

Gordon C. Brown and Ryszard J. Pryputniewicz
"Holographic microscope for measuring displacements of vibrating microbeams using time-averaged, electro-optic holography", Opt. Eng. 37(5), 1398-1405 (May 01, 1998). ; http://dx.doi.org/10.1117/1.601654


Figures

Tables

References

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.