Articles

Simple technique for replication of micro-optical elements

[+] Author Affiliations
Philippe Nussbaum, Ire`ne Philipoussis, Aline Husser, Hans Peter Herzig

University of Neucha?tel, Institute of Microtechnology, Rue A. L. Breguet 2, CH-2000 Neucha?tel, Switzerland

Opt. Eng. 37(6), 1804-1808 (Jun 01, 1998). doi:10.1117/1.601799
History: Received Sep. 29, 1997; Revised Jan. 13, 1998; Accepted Jan. 14, 1998
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Abstract

A simple technique for the replication of micro-optical elements is presented. Elastomeric material is used to realize a negative mold of the original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements, are produced. The refractive microlenses have a diameter of 970 μm and a height of 79 μm and the diffractive element is a multilevel blazed grating with a period of 64 μm. The characteristics of the replicated elements are measured using different methods. The deviation from a sphere of the original and the replicated refractive microlenses is 0.13λ and 0.12λ root mean square (rms), respectively. The replicated multilevel blazed grating has a diffraction efficiency of over 80%. An alternative method for realizing planoconcave microlenses from a planoconvex master is also presented. © 1998 Society of Photo-Optical Instrumentation Engineers.

© 1998 Society of Photo-Optical Instrumentation Engineers

Topics

Micro optics

Citation

Philippe Nussbaum ; Ire`ne Philipoussis ; Aline Husser and Hans Peter Herzig
"Simple technique for replication of micro-optical elements", Opt. Eng. 37(6), 1804-1808 (Jun 01, 1998). ; http://dx.doi.org/10.1117/1.601799


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