Simple technique for replication of micro-optical elements

Philippe Nussbaum; Irene Philipoussis; Aline Husser; Hans Peter Herzig

doi:10.1117/1.601799

1 June 1998 Simple technique for replication of micro-optical elements

Philippe Nussbaum, Irene Philipoussis, Aline Husser, Hans Peter Herzig

Optical Engineering, Vol. 37, Issue 6, (June 1998). https://doi.org/10.1117/1.601799

A simple technique for the replication of micro-optical elements is presented. Elastomeric material is used to realize a negative mold of the original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements, are produced. The refractive microlenses have a diameter of 970 µm and a height of 79 µm and the diffractive element is a multilevel blazed grating with a period of 64 µm. The characteristics of the replicated elements are measured using different methods. The deviation from a sphere of the original and the replicated refractive microlenses is 0.13?. and 0.12?. root mean square (rms), respectively. The replicated multilevel blazed grating has a diffraction efficiency of over 80%. An alternative method for realizing planoconcave microlenses from a planoconvex master is also presented.

Citation Download Citation

Philippe Nussbaum, Irene Philipoussis, Aline Husser, and Hans Peter Herzig "Simple technique for replication of micro-optical elements," Optical Engineering 37(6), (1 June 1998). https://doi.org/10.1117/1.601799

Published: 1 June 1998

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available