Interferometry

Heterodyne absolute distance interferometer with a dual-mode HeNe laser

[+] Author Affiliations
Yang Zhao

Tsinghua University, State Key Lab of Precision Measurement Technology and Instruments, Building 9003, Beijing?100084, China

Ting Zhou

Data Storage Institute, Singapore, 10 Kent Ridge Crescent, Singapore?11926

Dacheng Li

Tsinghua University, State Key Lab of Precision Measurement Technology and Instruments, Building 9003, Beijing?100084, China

Opt. Eng. 38(2), 246-249 (Feb 01, 1999). doi:10.1117/1.602273
History: Received Mar. 13, 1998; Revised Aug. 24, 1998; Accepted Sep. 18, 1998
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Abstract

Theoretical considerations and experimental results related to the principle of dual-wavelength absolute distance interferometry (ADI) are presented. It is predicted that the required initial uncertainty of a length to be measured was related to the synthetic wavelength, its stability, and the length to be measured. An absolute distance measurement approach employing a dual-longitudinal-mode He-Ne laser is proposed. In this approach, a heterodyne interferometer with two acousto-optic modulators (AOMs) is used to directly measure the fractional fringe at the synthetic wavelength formed by them. The common optical path configuration in the simplified interferometer eliminates the influences that air turbulence and mechanical vibration have on measurement. Factors that influence measurement accuracy are analyzed theoretically and experimentally. Mode mixing is determined as the main influence on the accuracy of the approach, and the error caused by it can be compensated through data processing if the amount of mode mixing is fixed. Additionally, an experimental result is presented that obtains an accuracy of 140 μm for 25 m. © 1999 Society of Photo-Optical Instrumentation Engineers.

© 1999 Society of Photo-Optical Instrumentation Engineers

Citation

Yang Zhao ; Ting Zhou and Dacheng Li
"Heterodyne absolute distance interferometer with a dual-mode HeNe laser", Opt. Eng. 38(2), 246-249 (Feb 01, 1999). ; http://dx.doi.org/10.1117/1.602273


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