1 August 1999 General phase-stepping algorithm with automatic calibration of phase steps
Chunlong Wei, Mingyi Chen, Zhijiang Wang
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A new general algorithm for phase-stepping interferometry is presented. The calculation of the phase distribution is composed of three least-squares fitting procedures for an analysis of real interferograms. First, we calculate the initial phase distribution utilizing Lissajous figures and elliptic least-squares fitting. Second, we calculate the phase steps through the spatial least-squares fitting. Finally, we calculate the exact phase distribution through the serial least-squares fitting. Both insensitivity to phase-step errors and automatic calibration of phase steps for the new algorithm are confirmed by experiment.
Chunlong Wei, Mingyi Chen, and Zhijiang Wang "General phase-stepping algorithm with automatic calibration of phase steps," Optical Engineering 38(8), (1 August 1999). https://doi.org/10.1117/1.602190
Published: 1 August 1999
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Cited by 22 scholarly publications and 1 patent.
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KEYWORDS
Phase shift keying

Phase measurement

Algorithm development

Calibration

Phase shifts

Modulation

Phase interferometry

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