Interferometry

General phase-stepping algorithm with automatic calibration of phase steps

[+] Author Affiliations
Chunlong Wei

Department of Communication Engineering, Shanghai University (Jiading Campus), Jiading, Shanghai, 201800, China

Mingyi Chen

Department of Precision Mechanical Engineering, Shanghai University (Jiading Campus), Jiading, Shanghai, 201800, China

Zhijiang Wang

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Jiading, Shanghai, 201800, China

Opt. Eng. 38(8), 1357-1360 (Aug 01, 1999). doi:10.1117/1.602190
History: Received May 24, 1998; Revised Feb. 5, 1999; Accepted Feb. 5, 1999
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Abstract

A new general algorithm for phase-stepping interferometry is presented. The calculation of the phase distribution is composed of three least-squares fitting procedures for an analysis of real interferograms. First, we calculate the initial phase distribution utilizing Lissajous figures and elliptic least-squares fitting. Second, we calculate the phase steps through the spatial least-squares fitting. Finally, we calculate the exact phase distribution through the serial least-squares fitting. Both insensitivity to phase-step errors and automatic calibration of phase steps for the new algorithm are confirmed by experiment. © 1999 Society of Photo-Optical Instrumentation Engineers.

© 1999 Society of Photo-Optical Instrumentation Engineers

Topics

Calibration

Citation

Chunlong Wei ; Mingyi Chen and Zhijiang Wang
"General phase-stepping algorithm with automatic calibration of phase steps", Opt. Eng. 38(8), 1357-1360 (Aug 01, 1999). ; http://dx.doi.org/10.1117/1.602190


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