Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer

Osami Sasaki; Takayuki Nakada; Takamasa Suzuki

doi:10.1117/1.602038

1 October 1999 Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer

Osami Sasaki, Takayuki Nakada, Takamasa Suzuki

Optical Engineering, Vol. 38, Issue 10, (October 1999). https://doi.org/10.1117/1.602038

A superluminescent diode interferometer that uses sinusoidal phase-modulating interferometry and the shifting method is applied to measure the front and rear surface profiles of a glass plate with an accuracy of a few nanometers. Since the roughness of the reference surface is large, a glass plate is put behind the object as another reference surface, which is estimated by the shifting method with an accuracy of a few nanometers.

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Osami Sasaki, Takayuki Nakada, and Takamasa Suzuki "Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer," Optical Engineering 38(10), (1 October 1999). https://doi.org/10.1117/1.602038

Published: 1 October 1999

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