OPTICAL METHODS FOR SHAPE MEASUREMENT

Surface topography by wavelength scanning interferometry

[+] Author Affiliations
Ichirou Yamaguchi, Akihiro Yamamoto

The Institute of Physical and Chemical Research (RIKEN), Optical Engineering Laboratory, Wako, Saitama?351-0198, Japan

Masaru Yano

Saitama University, Faculty of Engineering, Department of Mechanical Engineering, Urawa, Saitama?338-8570, Japan

Opt. Eng. 39(1), 40-46 (Jan 01, 2000). doi:10.1117/1.602333
History: Received May 20, 1999; Revised Aug. 10, 1999; Accepted Aug. 10, 1999
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Abstract

Parallel and absolute measurement of surface shape using wavelength scanning interferometry are applied to various objects, including diffuse and milled surfaces having discontinuities such as steps, dips, and protrusions. We employ not only the Michelson setup but also the newly introduced Fizeau setup. The behaviors of interference signals arising from these objects are experimentally compared. Spiky noises are observed from the milled surfaces and from the defocused diffuse surface. In spite of the noise, we succeed in measuring steps and narrow dips on a mirror and a milled surface, as well as a cylindrical protrusion on a diffuse surface. With a dye laser of 4.2 nm tuning range we attain a resolution of 39 μm within a depth of 3 mm. © 2000 Society of Photo-Optical Instrumentation Engineers.

© 2000 Society of Photo-Optical Instrumentation Engineers

Citation

Ichirou Yamaguchi ; Akihiro Yamamoto and Masaru Yano
"Surface topography by wavelength scanning interferometry", Opt. Eng. 39(1), 40-46 (Jan 01, 2000). ; http://dx.doi.org/10.1117/1.602333


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