MICROLENS ARRAYS

Holographically recorded gratings on microlenses for a miniaturized spectrometer array

[+] Author Affiliations
S. Traut, H. P. Herzig

University of Neucha?tel, Institute of Microtechnology, Rue Breguet 2, 2000?Neucha?tel, Switzerland

Opt. Eng. 39(1), 290-298 (Jan 01, 2000). doi:10.1117/1.602359
History: Received Feb. 12, 1999; Revised June 23, 1999; Accepted July 1, 1999
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Abstract

We report on the investigation of refractive microlens arrays with diffractive grating surfaces in the context of a microspectrometer array system. The elements fabricated combine the fairly large dimensions of the refractive microlens (990-μm diam, 60-μm height) with the submicron features of the diffraction grating (1-μm grating period) on one transmitting surface. The fabrication process of these elements was studied, as well as their performance with respect to resolution and stray-light suppression. The maximum resolution was 3 nm, and the stray-light suppression 25 dB. We present a concept for a system of miniaturized spectrometer arrays for chemical analysis. © 2000 Society of Photo-Optical Instrumentation Engineers.

© 2000 Society of Photo-Optical Instrumentation Engineers

Citation

S. Traut and H. P. Herzig
"Holographically recorded gratings on microlenses for a miniaturized spectrometer array", Opt. Eng. 39(1), 290-298 (Jan 01, 2000). ; http://dx.doi.org/10.1117/1.602359


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