REFLECTIVE OPTICS

Surface profiles of reflow microlenses under the influence of surface tension and gravity

[+] Author Affiliations
Andreas Schilling, Roman Merz, Christian Ossmann, Hans Peter Herzig

Institute of Microtechnology, University of Neucha?tel, Rue A.-L. Breguet 2, CH-2000 Neucha?tel, Switzerland

Opt. Eng. 39(8), 2171-2176 (Aug 01, 2000). doi:10.1117/1.1304845
History: Received June 22, 1999; Revised Jan. 7, 2000; Accepted Feb. 16, 2000
Text Size: A A A

Abstract

We present a finite-element method to calculate 3-D surface profiles of refractive microlenses fabricated by melting-resist technology (reflow technique). The geometry of the microlenses can be arbitrary. Surface tension and gravity are taken into account. Gravity can have an advantageous influence on the profile form, so that smaller focal spots can be achieved. A simple scaling law is given to estimate the influence of gravity on the profile form for given microlens parameters. We compared various theoretical and measured surface profiles of microlenses fabricated by melting-resist technology and found good agreement. Finally, the usefulness of this method for the design of refractive microstructures for smart masks is shown. © 2000 Society of Photo-Optical Instrumentation Engineers.

© 2000 Society of Photo-Optical Instrumentation Engineers

Topics

Microlens

Citation

Andreas Schilling ; Roman Merz ; Christian Ossmann and Hans Peter Herzig
"Surface profiles of reflow microlenses under the influence of surface tension and gravity", Opt. Eng. 39(8), 2171-2176 (Aug 01, 2000). ; http://dx.doi.org/10.1117/1.1304845


Figures

Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.