Instrumentation, Measurement, and Metrology

Two-dimensional small-rotation-angle measurement using an imaging method

[+] Author Affiliations
Takamasa Suzuki

Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata 950-2181, Japan

Takanori Endo

Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata 950-2181, Japan

Osami Sasaki

Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata 950-2181, Japan

John E. Greivenkamp

University of Arizona, Optical Sciences Center, Tucson, Arizona 85721

Opt. Eng. 45(4), 043604 (April 04, 2006). doi:10.1117/1.2188945
History: Received June 07, 2005; Revised August 12, 2005; Accepted August 16, 2005; Published April 04, 2006
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A two-dimensional small-rotation-angle measurement system based on fringe projection is proposed and demonstrated. Simple and effective signal processing is described and applied to the angular calculation. Several measurements indicate a measurement accuracy of 0.4arcsec, which is comparable to that of a high-priced autocollimator. The two-dimensional two-pitch grating used in our prototype system provides a wide measurement range, which is expected to reach 1300arcsec for both x- and y-direction rotations.

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© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Takamasa Suzuki ; Takanori Endo ; Osami Sasaki and John E. Greivenkamp
"Two-dimensional small-rotation-angle measurement using an imaging method", Opt. Eng. 45(4), 043604 (April 04, 2006). ; http://dx.doi.org/10.1117/1.2188945


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