Interferometry

Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm

[+] Author Affiliations
Joanna Schmit

Veeco Instruments Inc., 2650 East Elvira Road, Tucson, Arizona 85711

Parameswaran Hariharan

University of Sydney, School of Physics, Sydney, NSW 2006, Australia

Opt. Eng. 45(11), 115602 (November 10, 2006). doi:10.1117/1.2387882
History: Received December 12, 2005; Revised April 11, 2006; Accepted April 24, 2006; Published November 10, 2006
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We show how an eight-step algorithm with a high tolerance for phase-shift miscalibration can be used with a conventional Mirau interferometer, with only minor modifications to the software, for two-wavelength interferometric profilometry of surfaces exhibiting steps and discontinuities.

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© 2006 Society of Photo-Optical Instrumentation Engineers

Citation

Joanna Schmit and Parameswaran Hariharan
"Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm", Opt. Eng. 45(11), 115602 (November 10, 2006). ; http://dx.doi.org/10.1117/1.2387882


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