Mie scattering of growing molecular contaminants

Kenneth A. Herren; Don A. Gregory

doi:10.1117/1.2715944

1 March 2007 Mie scattering of growing molecular contaminants

Kenneth A. Herren, Don A. Gregory

Author Affiliations +

Optical Engineering, Vol. 46, Issue 3, 033602 (March 2007). https://doi.org/10.1117/1.2715944

Abstract

Molecular contamination of optical surfaces from outgassed material has been shown in many cases to proceed from acclimation centers and to produce many roughly hemispherical "islands" of contamination on the surface. The mathematics of the hemispherical scattering is simplified by introducing a virtual source below the plane of the optic, in this case a mirror, allowing the use of Mie theory to produce a solution for the resulting sphere in transmission. Experimentally, a fixed wavelength in the vacuum ultraviolet was used as the illumination source and scattered light from the polished and coated glass mirrors was detected at a fixed angle as the contamination islands grew in time.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Kenneth A. Herren and Don A. Gregory "Mie scattering of growing molecular contaminants," Optical Engineering 46(3), 033602 (1 March 2007). https://doi.org/10.1117/1.2715944

Published: 1 March 2007

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