Design of multiple-function long trace profiler

Shinan Qian; Peter Z. Takacs

doi:10.1117/1.2724851

1 April 2007 Design of multiple-function long trace profiler

Shinan Qian, Peter Z. Takacs

Author Affiliations +

Optical Engineering, Vol. 46, Issue 4, 043602 (April 2007). https://doi.org/10.1117/1.2724851

Abstract

The long trace profiler (LTP) is a useful optical metrology instrument for measuring the figure and slope error of cylindrical aspheres commonly used as synchrotron radiation (SR) optics. A multiple-function LTP (LTP-MF) is developed at the optical metrology laboratories of Brookhaven National Laboratory (BNL) with a goal of increasing the accuracy of the measurement and extending the range of applications to other areas. Characteristics of the LTP-MF are a very compact and lightweight optical head, a large angular test range (±16 mrad), and high accuracy. The LTP-MF can be used in various configurations: as a laboratory-based LTP, as an in situ LTP or penta-prism LTP, as an angle monitor, as a portable LTP, and as a small-radius-of-curvature test instrument. The system configuration, designs of the compact optical head and slide, and analysis of different measurements modes and systematic error correction methods are introduced. Preliminary comparison measurements between the LTP-MF and the LTP-II are presented.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Shinan Qian and Peter Z. Takacs "Design of multiple-function long trace profiler," Optical Engineering 46(4), 043602 (1 April 2007). https://doi.org/10.1117/1.2724851

Published: 1 April 2007

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