Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results

Daniele Spiga; Giovanni Pareschi; Vincenzo Cotroneo; Rodolfo Canestrari; Dervis Vernani; Alessandro Mirone; Claudio Ferrero; Claudio Ferrari; Laura Lazzarini

doi:10.1117/1.2769325

1 August 2007 Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results

Daniele Spiga, Giovanni Pareschi, Vincenzo Cotroneo, Rodolfo Canestrari, Dervis Vernani, Alessandro Mirone, Claudio Ferrero, Claudio Ferrari, Laura Lazzarini

Author Affiliations +

Optical Engineering, Vol. 46, Issue 8, 086501 (August 2007). https://doi.org/10.1117/1.2769325

Abstract

The reflectance effectiveness of a multilayer depends strongly on the stack properties (thickness, roughness, and density of each layer) and can be directly tested by means of x-ray reflectivity scans at definite photon energies. The reflectivity curves are also a powerful tool for the in-depth, nondestructive characterization of the stack structure: The complex task of extracting the stack parameters from reflectivity curves can be achieved via a suitable best-fitting computer code based on a global automatic optimization procedure. We present the computer-assisted layer-by-layer analysis of the characteristics of Ni/C, Pt/C, and W/Si multilayers, based on x-ray reflectivity scans performed at 8.05 and 17.45 keV. In order to verify the correctness of the code predictions, we present also a comparison of the computer model with the transmission electron microscope profiles of the same multilayer samples.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Daniele Spiga, Giovanni Pareschi, Vincenzo Cotroneo, Rodolfo Canestrari, Dervis Vernani, Alessandro Mirone, Claudio Ferrero, Claudio Ferrari, and Laura Lazzarini "Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results," Optical Engineering 46(8), 086501 (1 August 2007). https://doi.org/10.1117/1.2769325

Published: 1 August 2007

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