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Physical Optics, Diffractive Optics

Design, fabrication, and test of soft x-ray sinusoidal transmission grating

[+] Author Affiliations
Min Zhao

Chinese Academy of Sciences, Institute of Microelectronics, Key Laboratory of Nano-fabrication and Novel Devices Integrated Technology, Beijing 100029, China

XiaoLi Zhu

Chinese Academy of Sciences, Institute of Microelectronics, Key Laboratory of Nano-fabrication and Novel Devices Integrated Technology, Beijing 100029, China

Baoqin Chen

Chinese Academy of Sciences, Institute of Microelectronics, Key Laboratory of Nano-fabrication and Novel Devices Integrated Technology, Beijing 100029, China

ChangQing Xie, Min Liu, Jiebing Niu

Chinese Academy of Sciences, Institute of Microelectronics, Key Laboratory of Nano-fabrication and Novel Devices Integrated Technology, Beijing 100029, China

Longyu Kuang, Leifeng Cao

China Academy of Engineering Physics, Research Center of Laser Fusion, Mianyang 621900, China

Opt. Eng. 47(5), 058001 (May 12, 2008). doi:10.1117/1.2919717
History: Received September 25, 2007; Revised February 19, 2008; Accepted February 21, 2008; Published May 12, 2008
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We present a novel diffractive optical element, the quantum dot array diffraction grating (QDADG), used in soft x-ray spectroscopy. Because of its sinusoidal transmission it effectively suppress higher order diffractions, which can improve the precision and SNR of soft x-ray spectroscopy in laser plasma diagnosis. There are, however, many difficulties in the fabrication of a soft x-ray spectroscopy QDADG because of its small dimensions and complex pattern. We propose a hybrid lithography to fabricate a QDADG, including electron-beam lithography and x-ray lithography. The diffraction property of the QDADG is also proved to be consistent with a theoretical prediction using experiments.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Min Zhao ; XiaoLi Zhu ; Baoqin Chen ; ChangQing Xie ; Min Liu, et al.
"Design, fabrication, and test of soft x-ray sinusoidal transmission grating", Opt. Eng. 47(5), 058001 (May 12, 2008). ; http://dx.doi.org/10.1117/1.2919717


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