Instrumentation, Measurement, and Metrology

Well-conditioned multiple laser Mueller matrix ellipsometer

[+] Author Affiliations
Frantz Stabo-Eeg

Norwegian University of Science and Technology,N-7491 Trondheim, Norway

Morten Kildemo

Norwegian University of Science and Technology,N-7491 Trondheim, Norway

Ingar Stian Nerbø

Norwegian University of Science and Technology,N-7491 Trondheim, Norway

Mikael Lindgren

Norwegian University of Science and Technology,N-7491 Trondheim, Norway

Opt. Eng. 47(7), 073604 (July 23, 2008). doi:10.1117/1.2957047
History: Received October 12, 2007; Revised April 29, 2008; Accepted May 12, 2008; Published July 23, 2008
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We report on the design and performance test of a multiple laser Mueller matrix ellipsometer (MME). The MME is well conditioned due to the integration of the recently reported achromatic 132-deg compensators based on biprisms, in combination with high-quality Glan-Thompson polarizers. The system currently operates between 300 and 2700nm, without the need to change any optical components except for the detector. Four lasers are employed as light sources (405, 532, 633, and 1570nm) to test the performance in both reflection and transmission modes. Thus, the system is used to determine the Mueller matrices and associated optical constants of known optical systems: 1. optical rotatory power of D-glucose in solution, 2. reflection of a native oxide c-Si wafer, and 3. the properties of a liquid crystal spatial light modulator. The results show that the system matrices of the MME have condition numbers between the optimal 3 and 2 during operation, resulting in small experimental errors. To the best of our knowledge, there is no other MME reported with such good conditioning over a comparably wide spectral range.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Frantz Stabo-Eeg ; Morten Kildemo ; Ingar Stian Nerbø and Mikael Lindgren
"Well-conditioned multiple laser Mueller matrix ellipsometer", Opt. Eng. 47(7), 073604 (July 23, 2008). ; http://dx.doi.org/10.1117/1.2957047


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