Instrumentation, Measurement, and Metrology

Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry

[+] Author Affiliations
Kun-Huang Chen

Feng Chia University, Department of Electrical Engineering, 100 Wenhwa Road, Seatwen, Taichung 40724, Taiwan

Jing-Heng Chen

Feng Chia University, Department of Photonics, 100 Wenhwa Road, Seatwen, Taichung 40724, Taiwan

Ching-Hwa Cheng

Feng Chia University, Department of Electronic Engineering, 100 Wenhwa Road, Seatwen, Taichung 40724, Taiwan

Tsung-Han Yang

Feng Chia University, Department of Electrical Engineering, 100 Wenhwa Road, Seatwen, Taichung 40724, Taiwan

Opt. Eng. 48(4), 043606 (April 27, 2009). doi:10.1117/1.3121987
History: Received December 09, 2008; Revised February 24, 2009; Accepted February 25, 2009; Published April 27, 2009
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This study proposes a method for measuring small displacements. To this purpose, a circularly polarized heterodyne light beam, reflected from a mirror, impinges into a semispherical prism in a radial direction and is reflected at the flat base of the prism passing then through a properly oriented analyzer for interference. The phase difference between s- and p-polarized light results are sensitive to the impinging angle when it is equal to the internal reflection polarization angle. If the mirror is displaced, then it causes a small variation of the impinging angle and phase changes. The phase difference obtained allows evaluating the mirror displacement through heterodyne interferometry. The feasibility of this method was demonstrated, and the displacement measurement resolution is 46nm.

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© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Kun-Huang Chen ; Jing-Heng Chen ; Ching-Hwa Cheng and Tsung-Han Yang
"Measurement of small displacements with polarization properties of internal reflection and heterodyne interferometry", Opt. Eng. 48(4), 043606 (April 27, 2009). ; http://dx.doi.org/10.1117/1.3121987


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