0
Physical Optics, Diffractive Optics

Finite element method as applied to the study of gratings embedded in complementary metal-oxide semiconductor image sensors

[+] Author Affiliations
Guillaume Demésy

Institut Fresnel, Université Aix-Marseille III, École Centrale de Marseille, France and STMicroelectronics, Rousset, France

Frédéric Zolla, André Nicolet, Mireille Commandré, Caroline Fossati

Institut Fresnel, Université Aix-Marseille III, École Centrale de Marseille, France

Olivier Gagliano, Stéphane Ricq, Brendan Dunne

STMicroelectronics, Rousset, France

Opt. Eng. 48(5), 058002 (September 25, 2008March 24, 2009April 01, 2009May 29, 2009). doi:10.1117/1.3139291
History: Received September 25, 2008; Revised March 24, 2009; Accepted April 01, 2009; Published May 29, 2009
Text Size: A A A

We present a new formulation of the finite element method (FEM) dedicated to the rigorous solution of Maxwell’s equations and adapted to the calculation of the scalar diffracted field in optoelectronic subwavelength periodic structures [for both transverse electric (TE) and transverse magnetic (TM) polarization cases]. The advantage of this method is that its implementation remains independent of the number of layers in the structure, the number of diffractive patterns, the geometry of the diffractive object, and the properties of materials. The spectral response of large test photodiodes that can legitimately be represented in 2-D has been measured on a dedicated optical bench and compared to the theory. The validity of the model as well as the possibility of conceiving in this way simple processible diffractive spectral filters are discussed.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Guillaume Demésy ; Frédéric Zolla ; Olivier Gagliano ; Stéphane Ricq ; André Nicolet, et al.
"Finite element method as applied to the study of gratings embedded in complementary metal-oxide semiconductor image sensors", Opt. Eng. 48(5), 058002 (September 25, 2008March 24, 2009April 01, 2009May 29, 2009). ; http://dx.doi.org/10.1117/1.3139291


Access This Article
Sign In to Access Full Content
Please Wait... Processing your request... Please Wait.
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
 
Your Session has timed out. Please sign back in to continue.
Sign In to Access Full Content

Tables

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement

Buy this article ($18 for members, $25 for non-members).
Sign In