Physical Optics, Diffractive Optics

Singular beam scanning microscopy: preliminary experimental results

[+] Author Affiliations
Boris Spektor

Technion—Israel Institute of Technology,Department of Electrical Engineering, Technion City, Haifa, 32000 Israel

Alexander Normatov

Technion—Israel Institute of Technology,Department of Electrical Engineering, Technion City, Haifa, 32000 Israel

Joseph Shamir

Technion—Israel Institute of Technology,Department of Electrical Engineering, Technion City, Haifa, 32000 Israel

Opt. Eng. 49(4), 048001 (April 15, 2010). doi:10.1117/1.3381180
History: Received November 17, 2009; Revised February 19, 2010; Accepted February 19, 2010; Published April 15, 2010; Online April 15, 2010
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High-sensitivity and a high-speed nanoscale measurement is an important subject in modern industry, especially when analysis of high-speed moving nanoscale objects on a surface is required. Several objectives in this direction can be achieved by using singular beam microscopy, which we investigate experimentally for the examination of small phase steps. We discuss the challenges of rigorous modeling of experiments employing high-numerical-aperture illumination and describe experimental results performed with a medium numerical aperture of 0.55. The investigated equivalent phase step heights reached as low as 10nm (about 115rad).

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Boris Spektor ; Alexander Normatov and Joseph Shamir
"Singular beam scanning microscopy: preliminary experimental results", Opt. Eng. 49(4), 048001 (April 15, 2010). ; http://dx.doi.org/10.1117/1.3381180


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