Automated surface positioning for a non-null test interferometer

Goran Baer; Eugenio Garbusi; Wolfram Lyda; Wolfgang Osten

doi:10.1117/1.3488051

1 September 2010 Automated surface positioning for a non-null test interferometer

Goran Baer, Eugenio Garbusi, Wolfram Lyda, Wolfgang Osten

Author Affiliations +

Optical Engineering, Vol. 49, Issue 9, 095602 (September 2010). https://doi.org/10.1117/1.3488051

Abstract

An automatic method for the positioning of the test surface in a non-null interferometer is presented. A major task in the interferometric testing of surfaces is to avoid the introduction of surface aberrations due to an incorrect placement of the test object in the interferometer cavity. In the case of plane and spherical surfaces, adjustment errors can usually be distinguished from surface figure errors and therefore removed, but in the case of aspherical surfaces this task becomes nontrivial. In this work, the effect on the measured phase due to lateral and axial displacements of the aspherical surface is calculated, and an adjustment method for the positioning of the surface at a predefined measurement location presented. Experimental results showing the feasibility of the proposed procedure are shown.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Goran Baer, Eugenio Garbusi, Wolfram Lyda, and Wolfgang Osten "Automated surface positioning for a non-null test interferometer," Optical Engineering 49(9), 095602 (1 September 2010). https://doi.org/10.1117/1.3488051

Published: 1 September 2010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available