Interferometry

High-sensitivity surface-profile measurements by heterodyne white-light interferometer

[+] Author Affiliations
Akiko Hirai, Hirokazu Matsumoto

National Research Laboratory of Metrology, Quantum Metrology Department, 1-1-4 Umezono, Tsukuba, Ibaraki?305-8563, Japan E-mail: hirai@nrlm.go.jp

Opt. Eng. 40(3), 387-391 (Mar 01, 2001). doi:10.1117/1.1349216
History: Received Dec. 15, 1999; Revised July 7, 2000; Accepted Sep. 7, 2000
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A tandem white-light interferometer has been developed, based on the heterodyne technique, for highly accurate and sensitive surface profiling of a three-dimensional (3-D) object. Two acousto-optic modulators (AOMs) and two spherical reflecting mirrors are used in a Michelson interferometer to provide the optical frequency shift for white light. By using this technique in the tandem interferometer, the profiles of mirrorlike and diffusing surfaces of 3-D objects are measured with heterodyne signals of 200 kHz. The optical path difference of the interferometer can be stabilized by simultaneously using coherent and incoherent light. The experimental results show a 27-fold improvement in the stability of the interferometer and the possibility of achieving high accuracy of several tens of nanometers. © 2001 Society of Photo-Optical Instrumentation Engineers.

© 2001 Society of Photo-Optical Instrumentation Engineers

Citation

Akiko Hirai and Hirokazu Matsumoto
"High-sensitivity surface-profile measurements by heterodyne white-light interferometer", Opt. Eng. 40(3), 387-391 (Mar 01, 2001). ; http://dx.doi.org/10.1117/1.1349216


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