Shadow moire profilometry by frequency sweeping

Lianhua Jin; Yukitoshi Otani; Toru Yoshizawa

doi:10.1117/1.1385170

1 July 2001 Shadow moire profilometry by frequency sweeping

Lianhua Jin, Yukitoshi Otani, Toru Yoshizawa

Optical Engineering, Vol. 40, Issue 7, (July 2001). https://doi.org/10.1117/1.1385170

A frequency-sweeping technique is proposed to measure the shape of objects with discontinuous height steps and/or spatially separated surfaces, which have been impossible to measure with conventional shadow moirè topography. By controlling the rotation angle of the grating, spatiotemporal moirè patterns are produced with different contour intervals. The Fourier-transform technique has been applied to analyze these patterns and obtain the temporal carrier frequency, to which the height distribution of the object is related. Experimental results show the validity of this method.

©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Lianhua Jin, Yukitoshi Otani, and Toru Yoshizawa "Shadow moire profilometry by frequency sweeping," Optical Engineering 40(7), (1 July 2001). https://doi.org/10.1117/1.1385170

Published: 1 July 2001

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