THREE-DIMENSIONAL PROFILOMETRY

Shadow moire´ profilometry by frequency sweeping

[+] Author Affiliations
L. H. Jin, Y. Otani, T. Yoshizawa

Tokyo University of Agriculture and Technology, Department of Mechanical Systems Engineering, Nakacho 2-24-26, Koganei, Tokyo?184-8588, Japan E-mail: yoshi@cc.tuat.ac.jp

Opt. Eng. 40(7), 1383-1386 (Jul 01, 2001). doi:10.1117/1.1385170
History: Received May 31, 2000; Accepted Feb. 21, 2001
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A frequency-sweeping technique is proposed to measure the shape of objects with discontinuous height steps and/or spatially separated surfaces, which have been impossible to measure with conventional shadow moire´ topography. By controlling the rotation angle of the grating, spatiotemporal moire´ patterns are produced with different contour intervals. The Fourier-transform technique has been applied to analyze these patterns and obtain the temporal carrier frequency, to which the height distribution of the object is related. Experimental results show the validity of this method. © 2001 Society of Photo-Optical Instrumentation Engineers.

© 2001 Society of Photo-Optical Instrumentation Engineers

Citation

L. H. Jin ; Y. Otani and T. Yoshizawa
"Shadow moire´ profilometry by frequency sweeping", Opt. Eng. 40(7), 1383-1386 (Jul 01, 2001). ; http://dx.doi.org/10.1117/1.1385170


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