1 October 2001 Miniaturization and module integration of an infrared spectrometer
Kimmo Keraenen, Pentti Karioja, Martti Blomberg, Jussi Tenhunen, Outi Rusanen, Harri K. Kopola
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When designing a miniaturized optoelectronic module, modeling of the system allows us to optimize structures, materials, and components to achieve optimal performance and cost effectiveness of the final product. We have used an approach in which an analytical model and simulation model support each other to speed up and enhance the system's development process. Our system integration approach includes analytical modeling and raytrace simulation modeling of the system, system realization, and system characterization. Our pilot miniaturized system is comprised of three silicon micromachined devices: an electrically modulated thermal infrared emitter, an electrically tunable Fabry-Perot interferometer (FPI), and a photodetector. The analytical modeling of the system was verified by optical raytracing simulation software. The simulation results were verified by experiments thus enhancing the development of the simulation model.
©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)
Kimmo Keraenen, Pentti Karioja, Martti Blomberg, Jussi Tenhunen, Outi Rusanen, and Harri K. Kopola "Miniaturization and module integration of an infrared spectrometer," Optical Engineering 40(10), (1 October 2001). https://doi.org/10.1117/1.1406132
Published: 1 October 2001
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Cited by 1 scholarly publication.
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KEYWORDS
Silicon

Sensors

Systems modeling

Infrared spectroscopy

Signal detection

Spectroscopy

Infrared radiation

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