Deformation measurement on specular surfaces by simple means

Jurgen H. Massig

doi:10.1117/1.1403453

1 October 2001 Deformation measurement on specular surfaces by simple means

Jurgen H. Massig

Optical Engineering, Vol. 40, Issue 10, (October 2001). https://doi.org/10.1117/1.1403453

A simple technique for the quantitative deformation analysis of reflecting surfaces is presented. A plate with a special printed pattern consisting of crossed line gratings and an electronic camera are the only required equipment. The pattern is reflected by the specular surface and imaged by the camera. The mechanical deformation causes a slight distortion of the pattern image that is evaluated using the Fourier-transform method. The technique was tested on a glass mirror with side lengths of 105 and 132 mm, which was deformed by a central load. The sensitivity for out-of-plane displacements is 100 nm.

©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Jurgen H. Massig "Deformation measurement on specular surfaces by simple means," Optical Engineering 40(10), (1 October 2001). https://doi.org/10.1117/1.1403453

Published: 1 October 2001

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