Holography

Hybrid holographic microscope for interferometric measurement of microstructures

[+] Author Affiliations
Lei Xu, Xiaoyuan Peng, Anand K. Asundi, Jianmin Miao

Nanyang Technological University, Micro Machines Laboratory, Nanyang Avenue, Singapore, 639798 E-mail: p144869255@ntu.edu.sg

Opt. Eng. 40(11), 2533-2539 (Nov 01, 2001). doi:10.1117/1.1412621
History: Received Feb. 12, 2001; Revised May 14, 2001; Accepted May 15, 2001
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A hybrid holographic microscope is proposed to realize both imaging and interferometric measurement of microstructures and meet the two major challenges in micromeasurement, which are high resolution and small object size. The system is developed based on an in-line digital holographic arrangement incorporated with a long-distance microscope. Studies demonstrate that it is capable of realizing measurement of microstructures with lateral dimensions of at least 5 μm. The application of the system in micromeasurement is experimentally investigated on a microcantilever. The load-induced deflection is obtained and validated with numerically simulated results based on a finite element model. Error analysis for displacement determination is performed. © 2001 Society of Photo-Optical Instrumentation Engineers.

© 2001 Society of Photo-Optical Instrumentation Engineers

Citation

Lei Xu ; Xiaoyuan Peng ; Anand K. Asundi and Jianmin Miao
"Hybrid holographic microscope for interferometric measurement of microstructures", Opt. Eng. 40(11), 2533-2539 (Nov 01, 2001). ; http://dx.doi.org/10.1117/1.1412621


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