ORIENTATION AND COORDINATE MEASUREMENTS

Optical reference profilometry

[+] Author Affiliations
Stephan R. Clark

Agilent Technologies, 1400 Fountaingrove Parkway, MS 1USR, Santa Rosa, California 95403-1799E-mail: stephan_clark@agilent.com

John E. Greivenkamp

University of Arizona, Optical Sciences Center, 1630 E. University Blvd., Meinel Bldg., Tucson, Arizona 85721 E-mail: greiven@arizona.edu

Opt. Eng. 40(12), 2845-2851 (Dec 01, 2001). doi:10.1117/1.1419192
History: Received Nov. 17, 2000; Revised June 21, 2001; Accepted July 20, 2001
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The optical reference profilometer is a coordinate measurement machine (CMM) configuration that utilizes a special optical referencing frame to provide a stable and accurate surface measurement. This referencing frame provides several mechanical advantages that make it possible to use lower precision mechanical components while still maintaining high measurement accuracy. The optical reference profilometer also provides reduced measurement sensitivity to thermal variations of the environment. By utilizing a superinvar metering rod network, this CMM system is essentially thermally insensitive to temperature changes of the order of 1°C. This special feature makes the optical reference profilometer functional at a high measurement accuracy level in an open laboratory environment. © 2001 Society of Photo-Optical Instrumentation Engineers.

© 2001 Society of Photo-Optical Instrumentation Engineers

Citation

Stephan R. Clark and John E. Greivenkamp
"Optical reference profilometry", Opt. Eng. 40(12), 2845-2851 (Dec 01, 2001). ; http://dx.doi.org/10.1117/1.1419192


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