Interferometry

Stitching interferometric measurement data for inspection of large optical components

[+] Author Affiliations
Mikael Sjo¨dahl, Bozenko F. Oreb

CSIRO Telecommunications and Industrial Physics, P.O. Box 218, Lindfield 2070, New South Wales, Australia

Opt. Eng. 41(2), 403-408 (Feb 01, 2002). doi:10.1117/1.1430727
History: Received Mar. 19, 2001; Revised Sep. 24, 2001; Accepted Sep. 24, 2001
Text Size: A A A

An algorithm for stitching together a set of individual phase measurements into a unified larger phase map is presented. The set of individual phase maps results from scanning a component over the interferometer aperture and acquiring a measurement at each position. The algorithm is based on an iterative approach, where singular value decomposition is used to solve the rigid body movement problem between the different phase maps. The algorithm has been tested in numerical experiments and has been successfully applied to real data. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Mikael Sjo¨dahl and Bozenko F. Oreb
"Stitching interferometric measurement data for inspection of large optical components", Opt. Eng. 41(2), 403-408 (Feb 01, 2002). ; http://dx.doi.org/10.1117/1.1430727


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.