Phase-shifting interferometry: measurements with high-reflectance      surfaces

Parameswaran Hariharan

doi:10.1117/1.1457461

1 April 2002 Phase-shifting interferometry: measurements with high-reflectance surfaces

Parameswaran Hariharan

Optical Engineering, Vol. 41, Issue 4, (April 2002). https://doi.org/10.1117/1.1457461

With a phase-shifting Fizeau interferometer, problems arise in making accurate measurements of nominally flat optical surfaces with high-reflectance coatings. We describe a simple technique that can be used to make accurate measurements of such surfaces.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Parameswaran Hariharan "Phase-shifting interferometry: measurements with high-reflectance surfaces," Optical Engineering 41(4), (1 April 2002). https://doi.org/10.1117/1.1457461

Published: 1 April 2002

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