SPECIAL SECTION ON POLARIZATION

Principal Mueller matrix of reflection and scattering measured for a one-dimensional rough surface

[+] Author Affiliations
Soe-Mie F. Nee, Tsu-Wei Nee

Naval Air Warfare Center Weapons Division Research Department, Code 4T4100D, China Lake, California?93555-6001 E-mail: neesf@navair.navy.mil

Opt. Eng. 41(5), 994-1001 (May 01, 2002). doi:10.1117/1.1467359
History: Received Aug. 29, 2001; Revised Nov. 30, 2001; Accepted Dec. 11, 2001; Online April 26, 2002
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Reflectance R, ellipsometric parameters (ψ, Δ), depolarizations D, and cross-polarized depolarization Dv of specular reflection, and scattering by a rough stainless steel surface are measured using a null ellipsometer. The three polarization elements (Px,Py,Pz) of a principal Mueller matrix are obtained from D, ψ, and Δ. The measured ψ and Δ of specular reflection for incident angle θ>70deg are fit to the Fresnel equations to obtain n and k. The measured specular R(θ) is fit to Beckmann’s scattering theory to obtain the root mean square (rms) roughness σ. The fit σ (= 392 nm) is of the same order as the stylus measured σ (= 484 nm). The D of specular reflection is small (< 0.07). Scattering measurements are made with variable sample orientation at a detection direction 40 deg backward from the incident direction. The Dv of scattering is very small (< 0.002). The values of ψ, Δ, Px,Pz, and Dv of scattering are about constant for an off-specular angle (OSA) within ±60 deg and can be explained by the facet model with single scattering. The measured bidirectional reflectance distribution function (BRDF) in this region can be converted to slope angle distribution with OSA=2 slope angle. The values of ψ, Δ, Px,Pz, and Dv of scattering deviate significantly and symmetrically from a constant level for OSA>60deg, for which the simple facet model with single scattering does not apply. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Soe-Mie F. Nee and Tsu-Wei Nee
"Principal Mueller matrix of reflection and scattering measured for a one-dimensional rough surface", Opt. Eng. 41(5), 994-1001 (May 01, 2002). ; http://dx.doi.org/10.1117/1.1467359


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