Thin Films

Nonoxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm

[+] Author Affiliations
Juan I. Larruquert, Jose´ A. Me´ndez, Jose´ A. Azna´rez

Instituto de Fi´sica Aplicada-CSIC, C/Serrano 144, 28006-Madrid, Spain E-mail: larruquert@io.csic.es

Opt. Eng. 41(6), 1418-1424 (Jun 01, 2002). doi:10.1117/1.1477438
History: Received Apr. 25, 2001; Revised Dec. 12, 2001; Accepted Dec. 14, 2001; Online May 22, 2002
Text Size: A A A

Bilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength (λp83 nm). Above λp the bilayers have a high reflectance comparable to that of single Al films. Ir films were deposited by electron gun evaporation on a heated substrate. Al films of various thicknesses are deposited by evaporation from a thermal source on the Ir film once it is cooled to room temperature. The bilayers are prepared under ultra-high-vacuum (UHV) conditions and their reflectance is measured in situ. Accelerated aging processes, which are performed by annealing the bilayers in UHV, show that the bilayers are stable after 1 h annealing at temperatures up to 540±25 K. The bilayers show no observable deterioration after long-term storage under normal atmosphere. The optical constants of Ir films are also obtained. In-orbit coating of optical surfaces with Ir/Al bilayers is proposed for extreme UV astronomy. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Juan I. Larruquert ; Jose´ A. Me´ndez and Jose´ A. Azna´rez
"Nonoxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm", Opt. Eng. 41(6), 1418-1424 (Jun 01, 2002). ; http://dx.doi.org/10.1117/1.1477438


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.