Interferometry

Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio

[+] Author Affiliations
Alexander Tavrov, Michael Totzeck, Norbert Kerwien, Hans J. Tiziani

Universita¨t Stuttgart, Institut fu¨r Technische Optik, Pfaffenwaldring 9, 70569?Stuttgart, Deutschland E-mail: tavrov@ito.uni-stuttgart.de

Opt. Eng. 41(8), 1886-1892 (Aug 01, 2002). doi:10.1117/1.1490589
History: Received Nov. 5, 2001; Revised Feb. 4, 2002; Accepted Feb. 11, 2002; Online August 01, 2002
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The signal-to-noise ratio required to obtain 10-nm accuracy in the measurement of lateral position is studied with an interference microscope. Evaluations are performed using the rigorous coupled-wave analysis (RCWA) modal approach and Hopkins image formation theory. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Alexander Tavrov ; Michael Totzeck ; Norbert Kerwien and Hans J. Tiziani
"Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio", Opt. Eng. 41(8), 1886-1892 (Aug 01, 2002). ; http://dx.doi.org/10.1117/1.1490589


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