Optical Fabrication

Nanometer deep shaping with fluid jet polishing

[+] Author Affiliations
Silvia M. Booij, Hedser van Brug, Joseph J. M. Braat

Delft University of Technology, Department of Applied Sciences, Optics Research Group, Lorentzweg 1, NL-2628?CJ?Delft, Netherlands E-mail: s.m.booij@tnw.tudelft.nl

Oliver W. Fa¨hnle

FISBA-Optik, St. Gallen, Switzerland

Opt. Eng. 41(8), 1926-1931 (Aug 01, 2002). doi:10.1117/1.1489677
History: Received Oct. 8, 2001; Revised Jan. 22, 2002; Accepted Feb. 11, 2002; Online August 01, 2002
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We describe the theoretical dependence of various important parameters of the fluid jet polishing process on the material removal rate: the processing time, abrasive concentration, abrasive diameter, particle velocity, and the effect of scanning. Some recent experiments are described that prove that it is possible to remove very small amounts of material, less than 1 nm/min, using either short processing times or an appropriate slurry. The removal spot in the stationary case is compared to that in the translational case both theoretically and experimentally. From both a theoretical and an experimental point of view it is shown that the removal is in the ductile regime. © 2002 Society of Photo-Optical Instrumentation Engineers.

© 2002 Society of Photo-Optical Instrumentation Engineers

Citation

Silvia M. Booij ; Hedser van Brug ; Joseph J. M. Braat and Oliver W. Fa¨hnle
"Nanometer deep shaping with fluid jet polishing", Opt. Eng. 41(8), 1926-1931 (Aug 01, 2002). ; http://dx.doi.org/10.1117/1.1489677


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