1 September 2002 Fabrication of polymeric microlens of hemispherical shape using micromolding
Su-dong Moon, Shinill Kang, Jonguk Bu
Author Affiliations +
polymeric microlenses play an important role in reducing the size, weight, and cost of optical data storage and optical communication systems. We fabricate polymeric microlenses using the microcompression molding process. The design and fabrication procedures for mold insertion is simplified using silicon instead of metal. PMMA powder is used as the molding material. Governed by process parameters such as temperature and pressure histories, the micromolding process is controlled to minimize various defects that develop during the molding process. The radius of curvature and magnification ratio of fabricated microlens are measured as 150 ?m and over 3.0, respectively.
©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Su-dong Moon, Shinill Kang, and Jonguk Bu "Fabrication of polymeric microlens of hemispherical shape using micromolding," Optical Engineering 41(9), (1 September 2002). https://doi.org/10.1117/1.1497617
Published: 1 September 2002
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Cited by 41 scholarly publications and 1 patent.
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KEYWORDS
Microlens

Polymers

Silicon

Etching

Glasses

Photoresist materials

Process control

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