Interferometry

Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry

[+] Author Affiliations
C. Quan, S. H. Wang, C. J. Tay

National University of Singapore, Department of Mechanical Engineering, 10 Kent Ridge Crescent, 119260 Singapore

A. Q. Liu

Nanyang Technological University, School of Electrical and Electronic Engineering, Division of Microelectronics, Block S2, Nanyang Avenue, 639798 Singapore

H. M. Shang

National University of Singapore, Department of Mechanical Engineering, 10 Kent Ridge Crescent, 119260 Singapore

Opt. Eng. 42(1), 92-97 (Jan 01, 2003). doi:10.1117/1.1525795
History: Received Apr. 8, 2002; Revised July 5, 2002; Accepted July 5, 2002; Online December 30, 2002
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We have developed a measurement method to evaluate deformation of a metallic membrane (thickness 2 μm) in a micro-radio-frequency switch. The method is based on a modified Michelson interferometer incorporated with optoelectronic devices including a He-Ne laser, conventional optics, a CCD sensor, and a photodiode. To detect the deformation of the membrane in the rf switch, a He-Ne laser probe 10 μm in diameter is directed onto the specimen. The laser beam reflected off the membrane is combined with a reference beam. The combined laser beams are regulated to follow a common path. The resulting circular interference fringe pattern is simultaneously recorded by a CCD sensor and a photodiode. The deformation of the membrane is determined from the order of the resulting fringe pattern. As demonstrated by the experimental results, the proposed method is capable of measuring deformation of the rf switch at submicron levels. © 2003 Society of Photo-Optical Instrumentation Engineers.

© 2003 Society of Photo-Optical Instrumentation Engineers

Citation

C. Quan ; S. H. Wang ; C. J. Tay ; A. Q. Liu and H. M. Shang
"Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry", Opt. Eng. 42(1), 92-97 (Jan 01, 2003). ; http://dx.doi.org/10.1117/1.1525795


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